Pressestimmen
"...I can certainly agree with the final sentence of the book cover: A perfect introduction to the field--for professionals and students." (Angewandte Chemie, 2004, No. 11) "Through its focus on practical aspects and its didactic approach, the book is designed especially for practitioners. It can be highly recommended to materials engineers, physicists or process engineers who work or plan to work in the still exciting field of micro electronics." (European Society of Thin Films)
Kurzbeschreibung
This up-to-date handbook covers the main topics of preparation, characterization and properties of complex metal-based layer systems. The authors - an outstanding group of researchers - discuss advanced methods for structure, chemical and electronic state characterization with reference to the properties of thin functional layers, such as metallization and barrier layers for microelectronics, magnetoresistive layers for GMR and TMR, sensor and resistance layers. As such, the book addresses materials specialists in industry, especially in microelectronics, as well as scientists, and can also be recommended for advanced studies in materials science, analytics, surface and solid state science.
